Qualitative analysis of silicon nitride synthesized by ammonolysis of silicon tetrachloride

Abstract

Silicon nitride powder synthesis, performed by silicon tetrachloride ammonolysis, is described in this work. Gaseous ammonia reacts with liquid SiCl4, at low temperature and inert atmosphere. At a second step, a powder pyrolysis of silicon diimide is performed between 1300 and 1500degreesC, for ammonium chloride removal and Si3N4 formation. Phase formation is evaluated by X ray diffraction. Particle medium size and form is determined by Scanning Electron Microscopy.